Business
AP Systems, moving forward into the world with a passion for endless research and technological developments
Display(Front-End Process)
Laser Lift-Off
KORONA™ LLO
It is a Laser Lift-Off system designed for Flexible Display. Using laser, optics technology, and process modules, Carrier Glass is separated from the board to manufacture thin film devices. It is a core facility in the flexible display manufacturing process.
Technology
Irradiate Excimer Laser to separate polyimide (PI), which is a plastic material, formed on the glass board.
Specification
| Laser Type | Excimer Laser |
|---|---|
| Laser Wavelength | 308nm (XeCl) |
| Laser Repetition Rate | 600Hz |
| Laser Pulse Energy | 1J, 2J |
| Laser Uniformity | Long Axis (2σ): ≤ 1.8% (@96%), Short axis (2σ): ≤ 3.0% (@96%) |
| Stage Type | Single Plane or Stack Plane |
| Stage Position accuracy | X1, X2 axis: <±4um, Y1, y2 axis: <±4um |
| Process Environment | ATM |
| Software | Easy Cluster™ |
| Safety Certification | CE, SEMI, S-Mark |
