끊임없는 연구와 기술 개발에 대한 열정을 가지고 세계로 나아가는 AP시스템
자성을 이용한 비접촉식 회전(Magnet Levitation)으로 표면 내 우수한 온도 균일성을 확보합니다.
Item | Description | Unit | Specification | Remarks | |
---|---|---|---|---|---|
EFEM | Load Port | Quantity | Set | 3 | LPP(option) |
ATM-Dual Robot | Set | 1 | |||
Process Module | Heater Block | Process Pressure | Torr | 800 ~ ATM | |
Ch. Body | |||||
T Shape LAMP | Quantity | ea | 290 | ||
Power | Electrical Rack | SPEC | General Power | 208V, 3PH, MCCB630A | |
Temp. Control | Performance | Control Range | ℃ | 450 ~ 1150℃ | ±1.5℃ Control |
Ramping-Up | ℃ | Max. +250℃/sec | spike | ||
Ramping-Down | ℃ | Max. -90℃/sec | |||
Pyrometers per chamber | Quantity | ea | 5 | ||
Process | 49 Points RTO | Range | Å | ≤1 @1σ |
Item | Description | Unit | Specification | Remarks | |
---|---|---|---|---|---|
EFEM | Load Port | Quantity | Set | 3 | LPP(option) |
ATM-Robot & Aligner | Set | 1(with Aligner) | |||
VTM | Stack Load Lock | Quantity | Set | 4 | Particle Free |
Pentagon VTM | Set | 1 | |||
Process Module | Heater Block | Process Pressure | Torr | >2 | |
Ch. Body | |||||
T Shape LAMP | Quantity | ea | 290 | ||
MPD | Electrical Rack | Quantity | Set | 3 | |
SPEC | General Power | 208V, 3PH, MCCB630A | |||
Temp. Control | Performance | Control Range | ℃ | 450 ~ 1150℃ | ±0.5℃ Control |
Ramping-Up | ℃ | Max. +100℃/sec | |||
Ramping-Down | ℃ | Max. -40℃/sec | |||
Pyrometers per chamber | Quantity | ea | 5 | ||
Process | 49 Points RTO | Range | Å | ≤1 @1σ |